The CamScan CrystalProbe and Oxford/HKL EBSD system was installed in February 2008 (see installation pictures) at Service commun de microscopie électronique et analytique de l'Université Montpellier 2. The system will jointly operated by Université Montpellier 2, INSU-CNRS National Instrument Electron microscopy network and RIO Regional microscopy platform. The CrystalProbe is funded by INSU-CNRS, Ministry of Education and Research and Region Languedoc-Roussillon

The technical objective is the measurement of crystal orientation (by electron back scattered diffraction EBSD) at the highest possible resolution (10 to 50 nm depending on the material properties and surface condition) while the sample is at high temperature and/or deforming for long periods (e.g.10 hours), for the widest possible range of materials (metals, minerals, ceramics and biomaterials). The instrument will be unique in France and will have the status of national CNRS facility and be part of RIO technical plateform. To obtain these objectives the electron probe has to be generated by a field emission gun (FEG) for the highest resolution, the beam has to be inclined at 70° to the sample for the best compromise between electron diffraction pattern intensity and spatial resolution, and the sample chamber has to have a variable pressure to avoid charging on insulating materials (minerals, ceramics or biomaterials). Many commercial scanning electron microscopes meet these three requirements, but to obtain the correct geometry for EBSD the stage has to be inclined at 70°. The only electron probe specifically designed for the measurement of crystal orientation while conducting in situ high temperature experiments is the CamScan X500FE Crystal Probe, the specific features of this instrument are a horizontal stage with an inclined column optimised for EBSD. The unique advantages of this design are;
a) Improved accuracy during specimen positioning which is maintained over long periods necessary for high resolution EBSD mapping because of reduced mechanical wear, which is unavoidable for tilted stages of conventional microscopes for the vertical movement which is under greater load. Improved accuracy is essential for high resolution EBSD mapping.
b) Improved speed as translations are always in the horizontal plane and feed-back control loop for accurate positioning is similarly optimised for both X and Y translations. Improved speed will reduce EBSD mapping time, which is particularly important at high temperature.
c) The tilted column geometry allows a natural division of the column into two domains: a lower domain for heated sample stage and upper domain for the detectors (imagery, diffraction, and x-ray). The two domains are separated by a horizontal heat shield, which reduces the effect of radiation on detectors during in situ heating experiments. In addition circulating cooled water also reduces the effect of thermal radiation on detector mountings, heat shields, and sample holder.
d) The motorized stage has a special pre-programmed safe position to remove instantly the hot sample from the electron probe and detector area to void damage in the case of unexpected evaporation, volatilization or explosion of the sample.
e) Finally the horizontal stage allows the study of process such as melting, where as a tilted stage would lead to melt flow out of the sample under the action of gravity.